SPIE Proceedings [SPIE International Conference on Sensing units and Sensor Technology - Wuhan, China (Wednesday 10 October 2001)] International Conference on Sensor Technology (ISTC 2001) - Design of a rf-MEMS BAW filter using surface micromachining
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![SPIE Proceedings [SPIE International Conference on Sensing units and Sensor Technology - Wuhan, China (Wednesday 10 October 2001)] International Conference on Sensor Technology (ISTC 2001) - <title>Design of a rf-MEMS BAW filter using surface micromachining</title>](/images/quick-response-icon.jpg){kind=icon}
内容摘要
SPIE Proceedings [SPIE International Conference on Sensing units and Sensor Technology - Wuhan, China (Wednesday 10 October 2001)] International Conference on Sensor Technology (ISTC 2001) -
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