[IEEE [1993] IEEE Micro Electro Mechanical Systems - Fort Lauderdale, FL, USA (7-10 Feb. 1993)] [1993] Proceedings IEEE Micro Electro Mechanical Systems - Optical microshutters and torsional micromirrors for light modulator arrays
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内容摘要
[IEEE [1993] IEEE Micro Electro Mechanical Systems - Fort Lauderdale, FL, USA (7-10 Feb. 1993)] [1993] Proceedings IEEE Micro Electro Mechanical Systems - Optical microshutters and torsional micromirrors for light modulator arrays
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