[IEEE 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) - Beijing, China (2008.10.20-2008.10.23)] 2008 9th International Conference on Solid-State and Integrated-Circuit Technology - Monolithic integration of bulk micro-machined capacitive accelerometer and signal conditioning circuit
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![[IEEE 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) - Beijing, China (2008.10.20-2008.10.23)] 2008 9th International Conference on Solid-State and Integrated-Circuit Technology - Monolithic integration of bulk micro-machined capacitive accelerometer and signal conditioning circuit](/images/quick-response-icon.jpg){kind=icon}
内容摘要
[IEEE 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) - Beijing, China (2008.10.20-2008.10.23)] 2008 9th International Conference on Solid-State and Integrated-Circuit Technology - Monolithic integration of bulk micro-machined capacitive accelerometer and signal conditioning circuit
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